半導體:Semiconductor [優志旺股份有限公司] Halogen Heater是可以實現其他熱源所無法達到「快速升降溫及非接觸式加熱」效果的熱源,而且可以因應從100 C低溫區域到1200 C 高溫區域的寬廣溫度範圍。 在現今的半導體製程中,氧化膜的形成、淺接面的形成、矽化物的形成或CVD‧濺鍍裝置的熱源,另外 ...
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鹵素加熱燈管 [優志旺股份有限公司] Halogen L amp Heater的「非接觸式及快速升降溫」裝置,為燒結爐、CVD 等熱處理裝置上的標準熱源配備。 單晶矽、多晶矽、非晶矽、玻璃、薄膜 從100 C低溫到1200 C高溫皆可對應,對應溫度範圍廣泛。被認定為各種熱處理製程的標準熱源,應用相當廣泛 ...
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